零件查詢

原廠料號品名規格Amte PN/產品代號
0010-02170Assy, Left Hand, PivotAGM-230277
0010-02171Assy, Right Hand, PivotAGM-230278
0010-20079Assy PVD ChamberA-511-9112086
0010-08185Assy Orienter 650nm Laser OpticsA-511-9115185
0015-09042Resistor, Ceramic Near-net Shape
0015-09055Bellows, Assy, SusceptorA-511-9112070
0015-09327Screw, Mach BTN, 4-40x3/8 Hex SKT SSTA-511-G913368
0015-09329Screw, Mach BTN, 6-32x3/8 Hex SKT SSTA-511-9112523
0020-00590Bushing Upper Shield Upper InsuA-511-0618814
0020-00991Cathode Cover TrayA-511-9112812
0020-03398Insulation Pipe
0020-03597Carrier Spider LiftA-511-G913124
0020-03656Vespel ScrewA-611-9111504
0020-03672Vespel Clamp RingA-511-DB19624
0020-04181Insulating Flange RoundA-511-G913038
0020-09030Base FlangeAXI-220772
0020-09053Flag STD CathodeA-511-9112834
0020-09069Lift Pin, Viton TipA-511-G913051
0020-09307Bushing, MountA-821-C110528
0020-09373Seal, Small FaceA-821-9111232
0020-09545Filter, Slit Window, CVDA-511-C115440
0020-09602Manifold InputA-161-0309053
0020-09604Gas Feed Through TeflonA-871-0309051
0020-09843Sleeve Wafer Lift PinA-511-9113821
0020-09885Insulating WasherA-R11-C118096
0020-10059Ring, Wafer LiftA-511-C118475
0020-10117Perf. Plate, TEOS OX 200mmA-511-F911191
0020-10134Manifold OutputA-161-0309054
0020-10402Pumping PlateA-511-C1210672
0020-10467Housing, Quartz, TubeA-821-C110529
0020-10704Seal, Throttle Valve TEOSA-431-5211391
0020-10888Set Screw Slotted Half Dog, 4-40x5/16"A-511-9111312
0020-10936Blocker Plate SilaneAXI-230825
0020-18899Washer, Nozzle Ultima HDCVDA-511-C112693
0020-20114Isolator for RTA AL CE ShieldC-211-96112708
0020-20126Ceramic DC BIASC-211-6112709
0020-21114Blade, Buffer 6" RobotA-611-J712381
0020-21366SCR Shoulder DC Bias TiWA-511-0414087
0020-21462Insulator Source, 11.30" PVDA-511-C118179
0020-21463Shield Al/Ti 6"
0020-21664Insulator Source, 13" PVDA-511-CL19960
0020-22852Shield 8", Preclean
0020-23093WASHER INSULATOR CERAMICC-211-6111171
0020-23181Cover Ring, 6"
0020-23352Disk Heater
0020-24243Shield, Upper SST FlameA-511-11201481
0020-24244Shield, Lower SST TiN WAF
0020-25730Upper Shield
0020-26254A-511-9115294
0020-26310Shield, Lower 6" ClampedAGP-220164
0020-26311AGM-230211
0020-26312Shield, Upper 8" DuraSource TTN SSTA-511-9115206
0020-26967PC II Gas Trench CoverA-511-9115298
0020-26973AGM-230212
0020-27113Clamp Ring 6"AGP-220165
0020-29343IMP Dark Space ShieldA-611-E610628
0020-29344200mm IMP Vectra Lower
0020-29431AGM-230213
0020-30000Clamp, Pin, Adj. WBA-511-9111313
0020-30031BW Finger NutA-161-9112399
0020-30032Nut, JamA-161-9112571
0020-30185Screw, Panhead 4-40x.350"L, anodized AlA-511-9112319
0020-30302Screw, MACH SKT HD 4-40*.25L, AlumA-161-0009566
0020-30320SCR Alum SKT HD 6-32*1/2 LG, 7/64 HexA-161-0009567
0020-30329Screw, Alum SKT HD 6-32x1/2 LG 7/6A-161-0009567
0020-30335Housing, Quartz Tube for SAA-821-G913233
0020-304278" Vespel Clamp RingAL6-230774
0020-30678Clamp Ring Vespel, Poly 150mmF-912-W1210355
0020-31425Mixer, Gas FeedthruA-511-9113075
0020-31488as Distribution Plate 13 holesAX1-220523
0020-31493133 Holes GDP, P5000, Poly Etch511-0305005
0020-31626Flange, Insulating, ESCA-511-1118522
0020-31633Conductive PinA-611-1116469
0020-31659Cover, Vespel
0020-31737Insulator FlangeA-511-R614443
0020-31740Screw, VespelA-511-9113385
0020-32048Post, Upper, 2 PC, Vespel, Ext. PedestalA-911-9113591
0020-32049Cap, Vespel, ESCA-511-9113383
0020-32364Bracket, Recessed Endpoint
0020-33166Aluminum ShimA-511-G913053
0020-34118150mm Vespel Clamp RingA-511-9111540
0020-42287Perforated PlateA-611-C112802
0020-61949Strap SST Lower Shield GroundABY-230678
0020-76065Idel Gear Robot Driver A-611-0010665
0020-78177Gasket, Robot BladeA-511-9113081
0020-82474Shield, Source Cham
0020-98877Flight Tube Inser, Outer
0021-04585IMP Dark Space Shield
0021-081818-32 Flt Head Vented Screw 300mm TxZ Chamber
0021-08181-M8-32 Allen Head Vented Screw 300mm TxZ Chamber
0021-09105Adjust Lift Pin Assy
0021-09511Insulator, Cathode Base, 200mm DPS
0021-09902Gasket, Thermal, ESC WEBA-511-9114373
0021-10296Manifold Output, SACVDA-161-C110202
0021-10666Water Block, Chamber LidA-511-9113861
0021-01568Screew Blocker Plate 4-40 x 38L SACVD
0021-19495Hoop, 200mm, ASP
0021-23550Manifold, Input MOD for Applied P5000A-161-C110201
0021-35819Chuck ASP 200mm Type Mount Type
0021-36130Flange, Base FlangeA-511-C115038
0021-41125133 Holes GDP, P5000511-0305005
0021-54083Pin Anntena PC II
0030-00195Large Face Seal, 150mmA-511-9112314
0030-09036Lip Seal, SmallA-611-9111471
0030-09050Large Face Lip Seal O-ringA-K71-BK19186
0040-01929Al Block for Ceramic HoopA-161-0311187
0040-02818Center Block, Chamber LidA-511-9113860
0040-09005Cathode Base STDA-511-9114086
0040-09069Cable Assembly for P5000 RobotA-611-0010666
0040-09095Gas Box
0040-09212Ring Wafer Lift Ceramic HoopC-211-0310552
0040-20068Bellows Lifter PVD
0040-20136Manifold, H2O Source 13"A-121-0310465
0040-21178Preclean II Bell JarA-511-C112724
0040-23789Collimator, Foil 5/8" HEX 1:1 ShapedAGM-230225
0040-61877CxZ Chamber Lid, GigafillA-511-L320641
0040-87712Lift Pin Nail Head, Producer EtchC-211-92201476
0040-97186Shoe, Pickup 150mm 30 Deg.A-511-9114071
0050-25994Manifold Water Source 13in SST
0090-02952Robot motor rotationA-511-6210770
0090-02953Motor, Robot, Extension A-511-6210769
0090-09016FeedThru Assy Cap SensorA-611-0010730
0090-09079Lamp Assembly, Mercury 16in Lead
0090-36342Assy Hall Effect SensorA-511-G214964
0090-75009Robot motor rotation, replaced by 0090-02952A-511-6210770
0090-75010Motor, Robot, Extension, replaced by 0090-02953 A-511-6210769
0140-09025Assy Harness Etch Cover Interlock
0140-09122Harness Assembly CableA-511-C113622
0140-09173Cable
0140-09664Proteus Flow Meter
0140-70070Cable Harness Assy.
0140-70353Harness Assy VHP Mainframe Transfer Chamber
0150-09054Assy. Cable RF Match
0150-11367Cable Assy Motor EncoderA-511-9114880
0150-70017Cable Assy. Encoder Flat Flex 6 Pos.A-611-0010661
0150-70018Cable Assy. Encoder Flat Flex 34 Pos.A-611-0010662
0150-75068Cable, Encoder
0190-07917Proteuus Flow Meter 0100SS24 + .4 GPM trip point
0190-08357O-ring, ID 14.475, CSD 0.275, Teflon-Enc Lower Dome
0190-09133Switch, 75 Torr VCR, Close, DecreasingA-511-0713252
0190-09184Sensor, Vac Feedthru T/C PRSPA23-220751
0190-09365Switch, ATM VCR, Close, DecreaseA-511-0713253
0190-13035Infrared Heater Lamp BulbA-511-9113093
0190-13175Light Pen SST 5V 20MA w/Phone Jack
0190-21067Filter A-511-9113881
0190-28684Ring Seperation MXP+AGP-220167
0190-30355Light Pen SST 5V 20MA w/Phone Jack
0190-35049Base, H2O Cooled PyrometerA-511-2313111
0190-36349Infrared Heater Lamp Bulb
0200-00043Cover, Quartz Poly 150mm
0200-00137Ring, Capture C-211-0113439
0200-00247Ring, Capture, 195 mm, SNNF Ceramic, DPSC-211-0113478
0200-00261Chamber Insert 200mm TXZ CIPA-511-L618599
0200-00353Pin, ceramic C-211-6111236
0200-00368Collar, 200mm SNNF, HDPCVD UltimaC-211-FF210907
0200-00406Bushing, Pedestal RPC +A-511-9113121
0200-00410Uni-Insert,GDP, Linear, 88 holes, QTZA-511-911835
0200-00590Bushing Upper Shield Upper InsuA-511-0618814
0200-00621Shadow Ring, 200mm WXZ+ NCSR 1.5mm EEC-211-J012766
0200-00622Ring, Outer 200mm WXZ+ NCSRA42-230594
0200-00624Purge Ring, 200mm WXZ+ NCSRC-211-J012767
0200-00689Lid Liner HPTXZA-511-9112150
0200-00969Pumping Liner FSG - TEOS Producer 200 mm
0200-01009Nozzle 4 holes 60 Deg Baffle, UltimaA-211-C113483
0200-01196Lift Pin, Fast Lift, Alumina, NonconductiveC-211-9115497
0200-01197Lift Pin, Adjust Fast Lift, Alumina, NonconductiveC-211-9115498
0200-01284Shadow RingA-311-U3210872
0200-01326Insulator 300mm Source Adptor CeramicCFF-01326
0200-01610Injector, Gas, 15 holes, .020 Dia. C-211-6119698
0200-01611Injector, Gas, 12 holes, .020 Dia. C-211-6119599
0200-01798Pin, Lift, Heater, TXZC-211-6112063
0200-02042Pin Cover SipilC-211-6111535
0200-02575LIFT PIN FIXED LIFT PINC-211-6111117
0200-02576Lift Ring, Fixed Lift Pin 200 mm ProducerC-211-6111119
0200-02626Top RingA-311-U3210871
0200-03314Lift Pin 170 Fixed Floating 300mm, ProducerC-211-6111257
0200-03954Top Liner EC2 SACVD Producer SEC-211-FF210996
0200-03969Pumping Liner SR Top Producer SE APFC-211-0419950
0200-05082Nozzle, AlN 1.76L*0.14Dia, 99% Flow
0200-05377Tube, Plasma, 25mmA-511-9115150
0200-07102Yttria Ceramic Nozzle G5CFF-220794
0200-07414Lift PinC-211-G018280
0200-07415Isolator CeramicC-211-G018279
0200-07418Spacer PinC-211-G018281
0200-07442Insulator 300mm Source Adptor CeramicCFF-230187
0200-07514Insulator 300mm Source Adptor CeramicCFF-230186
0200-08334Lift Hoop, Pin LiftC-211-0413436
0200-09027Adaptor, Pumping PlateC-211-0310943
0200-09035Pin, Wafer Lift, 6", CeramicC-211-0309323
0200-09071Pin, Wafer Lift, 200mm A-511-B914140
0200-09072Shield Ring, 200mm C-211-0310387
0200-09074Window, Heater, QuartzA-311-0309038
0200-09075Adaptor Pump Plate 200mm Narrow Gap NITRA-511-C1210674
0200-09121Shield, 150mmC-211-0310386
0200-09134
0200-09147Finger, Hoop, WCVDC-211-0309324
0200-09158Window, Heater, QuartzA-311-0309037
0200-09183Shield Nitride 150mmC-211-C118496
0200-09224Adaptor Ring, Gap Nitride 4,5,6"
0200-09287
0200-09315Inner RingC-211-5211489
0200-09319Ring, Outer Shadow Ring, 150 mm, BWCVDC-211-0310581
0200-09366Plug, DC Graphite Poly 150mm A-511-9112927
0200-09384Pin, Wafer Lift, 150mm, Universal ChamberC-211-0416262
0200-09558Collar, Quartz, 150 mm Poly311-4407083
0200-09602Pipe,Insulating, Quartz, w/ FlangeA-511-9114104
0200-09610Ring, Outer Quartz Ring, 150mmC-211-0313480
0200-09626Collar, 150m MXP
0200-09636Plug, w/ Head, SiCA-511-911215
0200-09657Window, Recessed, Endpoint
0200-09664Window, SlitA-611-5211494
0200-09716LIFT PIN HEATER WXZC-211-6111258
0200-09735Cover, Clamp Ring No HoleA-511-G913050
0200-09757Ring, Clamp Flat 150 mmA-511-2314607
0200-09758Collar, 150 mm Pedestral, Al Finger
0200-09759Ceramic Shield, 150mm PedestralA-511-9112409
0200-09772Slit Window UV FilterA-511-5212186
0200-09782Pipe,Insulating, Quartz, Lift, ESC
0200-09785Cap, ESC, QuartzA-511-9113384
0200-09789Cover Quartz, 6", Stepped, Lift 2, Flat
0200-09850Ring, Shadow 3mm, WCVDC-211-0309322
0200-09893Focus Ring, 162mm Flat, Poly ESC
0200-09898Plug, Bias, Ext Ped, Graphite, Lift, ESCA-511-9113382
0200-10003Inner Shadow RingA-511-L812940
0200-10027Inner Ceramic RingCFF-220517
0200-10074Lift Pin, Delta MF Nitride XP, 200mm, P ChuckC-211-6112228
0200-10087Ring, Outer, -1.50" SSGD, R2 ChamberCFF-220516
0200-10157Linear, Junction, SiN, DxZC-211-6112850
0200-10158Sleeve Junction T02526C-212-6108063
0200-10163RING WIDE CAPTURE CERAMIC C-211-6117011
0200-10169Plate Edge Cover DxZ GecoC-211-61210908
0200-10191Shield Common Silane 200mmAD6-210191
0200-10194Ceramic Shield TaperedCX1-230825
0200-10203Pin, Wafer Lift, FingerC-211-0309390
0200-10243Shadow Ring, Quartz, 150mm
0200-10246Uni-Insert,GDP, Linear, 88 holes, QTZA-611-9112167
0200-10284PIN LIFT HEATER DXZ 930050C-211-6111282
0200-10286Ring, Finger Lift Plate, 6" & 8"A-511-AA201281
0200-10446Silicon Insert Ring, 8"A-511-Q814256
0200-10491Insulator Power Side DPACGR-220363
0200-12371Rev.01 COOLING INSERT OUTERC-211-6111558
0200-12372Rev. 01 COOLING INSERT INNERC-211-6111557
0200-14553Insert Ceramic ShadowC-211-6114412
0200-18093Nozzle, All Ceramic 2.55L, 1.5% HDPCVDC-211-6118846
0200-20169Insulator Coil Support RigidA-511-AU17940
0200-20170Cap Coil Support RigidA-511-9112204
0200-20175Labyrinth Rigid Coil Support Vector IMPC-211-6112064
0200-20210Insert, Double RF Connector, Vectra IMP，930141C-211-6112229
0200-20216Pin Cover RF ScrewC-211-6113513
0200-20285Pedestal Cover 8"A-511-9112209
0200-20315Rest Button B101 CeramicC-211-6112710
0200-20331Cover Ring A-511-L614255
0200-24111Ceramic Hub AssemblyCFF-230648
0200-24271INSERT CERAMIC SHADOW RI 0200-24271 REV02C-211-6118757
0200-35290Housing Gas Feed DPS MECC-211-6111210
0200-35291HOUSING GAS NOZZLE DPS MECC-211-6111211
0200-35292Window, Endpoint, DPS, MECA-511-DC19630
0200-35293Window, Manometer Port, DPS, MEC A-511-BK19300
0200-35295HOUSING GAS FEEDC-211-6111212
0200-35296PLUG INNERC-211-6111213
0200-35525901412 RESISTOR CERAMIC NEAR N陶瓷本體,不塗布C-211-6111348
0200-35528Pin, Isolator Spacer, 300mm PoducerC-211-6111555
0200-35611Screw, Lid Liner TXZC-211-6112054
0200-35623Insert Ring Silicon, 150mm, Flat
0200-36105Chamber Insert
0200-36118Edge Ring, 200mm wafer Batch CoatedA-611-C112806
0200-36373PIN LIFT PRODUCER 900551C-211-6111172
0200-366296" Cover Plate, AlNC-281-0416328
0200-36630Cover Plate
0200-36631Cover Plate Patterned
0200-36666Ceramic Isolator, Producer 200mmA-211-4107530
0200-36649Plate, Finger Lift Ring, 200mm Producer
0200-36699Lift pin, Super-e, non-conductiveC-211-X1210586
0200-36700Lift Pin, Adjust Fast Lift, Alumina, NonconductiveA-511-X1210294
0200-39133Window endpoint 0200-39133C-211-6111235
0200-39135T03032 WINDOW MANOMETER PORT DC-211-6109876
0200-39289Isolator TEOS Pumping Ring
0200-39361Isolator Silane Pumping Ring
0200-40156HDP lift PinA-511-C112691
0200-71586Pin, Ceramic for AKTC42-220803
0240-20021Kit DC Bias HW Non Shtter Compatible
0270-20080Tool Zero PositionAGM-230249
0720-02773Conn Coax Adptr Str Skr Type 716A-511-G913296
0950-01449Laser DiodeA-611-J712382
1010-01088Lamp, 1000W, 120V
1010-01116Lamp, Halogen 120V, 800WA-511-9112195
1010-01254Lamp, Quartz, 500W, 120V, T3 Translucent
1270-01105Germs LS-7 float Level SwitchA-511-9112775
3060-01145Bearing, .375IDA-611-0010656
3060-01221BearingA-611-0010657
3060-01225Bearing, 0.75 ID x 1.635 ODA-511-9112005
3080-01029Belt TMG 3mm 84TA-611-0010658
3080-01030Belt TMG 3mmP 6mmW 96T HTD NeopreneA-611-0010659
3080-01031Belt, Timing, Storage ElecvatorA-511-C119492
3080-01041Belt, Susceptor/Wafer Lift AssemblyA-511-9112072
3080-01048Belt, Timing, Throttle VavleA-511-9113068
3080-01054Belt 3mmP 6mmW 89TA-P02-BK18728
3080-01059Belt TMG 3mmP 9mmW 75T IIR Neoprene 225 LG
3080-01141Belt TMG 1/5P 3/8W 135 Teeth, Urethane
3080-01163BELT TMG .080P 1/4W 70T 15.4LB KEVLARA-511-9113067
3250-01007Container, Deionizer Tank with ResinA-511-9112112
3300-01963FTG Pipe QDISC Body, 3/8 MNPT, 2.38"L, 3/4
3300-02261 (G)Viewport 6"A-511-9113122
3300-02261 (Q)Viewport 6"
3320-01060RF Shield
3310-01068Gauge Filament Assy for Ion GaugeA-511-9113837
3310-01068Ion Gauge
3310-01071TC Gauge with VCR FittingA-511-9112088
3310-01074TC Gauge with VCR Fitting, TC531
3320-01026Gasket 10 CFF OFHC CUA-511-9115523
3320-01027Gasket 2.75" CFF OFHC Cu
3320-02242Gasket 1.33 CFF OFHC Copper
3440-00087WDO Sapphire Lens 25mm
3500-01428Nut Thumb 8-32 x .125 THKA-511-X1210734
3610-01033TMG Pulley (50 GRV, 1/.88 PD, 5/16 Bore, 3mm)AD8-240094
3690-01041Screw, Blocker 6" TEOS
3690-01159Screw Cap FIT HD 8/32 x 3/8 PHH VentedA-511-9113218
3690-01452Screw cap, SKT HD 8-32 x 5/8L Hex SKT Vent 18 SSTA-111-9114376
3690-01447Screw, Flat HD 4-40 UNC * 1/2 LA-111-9113233
3690-01458Screw, 8-32 * 3/8 SCKT HD CAPA-511-9113219
3690-01629Screw Mach BTNA-111-9113234
3690-01766Screw, Mach HDA-111-G913291
3700-01008O-ring, Viton
3700-01033O-ring, ID .299 x CSD .103, Viton
3700-01035ORING ID .424 CSD .103 VITON 75DURO BLKA-841-9112078
3700-01072O-ring, ID 5.734 CSD .139, Viton
3700-01122O-ring, ID 4.109 CSD .139, Viton
3700-01130O-ring, ID 1.299 CSD .103, Viton
3700-01136O-ring, ID 17.955 * CSD .210, Viton
3700-01156ORING ID 15.955 CSD .139 VITON 75DURO BLA-841-9116445
3700-01170O-ring, ID 18.955 CSD .210; V75AU2-220486
3700-01205Loadlock O-ring
3700-01208ORING ID 12.984 CSD .139 VITON 75DURO BLA-841-0210813
3700-01234O-ring, ID2.859 CSD.139, Viton
3700-01267O-ring, VitonA-841-B913883
3700-01338O-ring, ID 8.984; CSD .139, Viton A-841-9111329
3700-01357Lip Seal A-511-9115603
3700-01358O-ring, Chamber Slit Valve A-K21-9114600
3700-01374O-ring, ID 11.984 CSD .139, Viton
3700-01377O-ring, AS007 Silicone Black 60 Duro
3700-01389O-ring, ID 8.234 CSD .139, Viton
3700-01390VAT Rectangular Seal
3700-01425O-ring, ID 14.983" x CSD .139", AS281A-841-9114543
3700-01427O-ring, ID 4.984 CSD .139, Viton
3700-01466O-ringAU2-220488
3700-01473T.V. Seal O-ring, ID .989 x CSD .070, Kalrez 4079, 75 DUR
3700-01478O-ring ID 1.737 CSD .103 VITON 75DURO BRA-841-K612714
3700-01484Seal, Dyn. Radial 1.241OD x 0.998ID x .235W SSA-611-0010663
3700-01485Seal, Dyn. Radial 2.243 OD x 2.01 ID x .235W SSA-511-0010664
3700-01493O-ring, ID 0.989 CSD 0.70, Kalrez
3700-01496O-ring, ID10.984 CSD.139, Kalrez 4079A-K31-5212111
3700-01504O-ring, ID 7.484 CSD .139, Viton
3700-01508Viewport O-ring, ID 2.859* CSD 39, Viton 75 Duro
3700-01509O-ring, ID 7.234 CSD .139, Viton
3700-01545O-ring ID 2.484 * CSD .139, Viton
3700-01578O-ring ID .484"; CSD .139", Kalrez 4079, 75 Duro
3700-01622ORING ID .612 CSD .103 VITON 75DURO BLKA-841-U917276
3700-01623Wiper/Scraper Ring 1.25" ShaftA-511-B915074
3700-01715O-ring ID 7.484"; CSD .139", 80 Duro WhiteA-841-B213570
3700-01796O-ring ID .424"; CSD .103", Viton
3700-01823O-ring ID .237"; CSD .103", Chemraz SC513, White
3700-01852ORING ID .549 CSD .103 VITON 75DURO BLKA-841-9112039
3700-01923ORING ID 17.955 CSD .210 VITON 75DURO BRA-841-K614382
3700-02044O-ring, ID .674 CSD .103, Viton
3700-02141O-ring AU2-220485
3700-02411O-ring ID 11.484"; CSD .139", VitonA-841-D113297
3700-02431O-ring ID 13.984"; CSD .139", VitonA-511-L812938
3700-02447O-ring ID 10.984"; CSD .139", VitonA-841-9114203
3700-02749ORING ID 2.234 CSD .139 VITON 75DURO BRNA-841-U917275
3700-04319O-ring, ID 19.995 CSD .210; V75AU2-220487
3860-01125Tubing Plastics, 1/4" OD x 3/16 ID, 1/32 Wall
3860-01134Clear Vacuum Tubing, 10M
3870-01215Pneumatic Right Angle Valve
3870-01245Valve Pneu BLWS 2 Way Mini NCA-511-9112810
3870-01306High Purity Diaphragm Valve
3870-023223-Way Bypass Valve
3880-01004Washer, Flat #4, .312OD x .125ID x .31THK, SSTA-611-9111512
3880-01215Washer Flat, .375OD x .161ID x .62 THK, TeflonA-431-9114360
4020-01140Filter Cartridge DI Water
原廠料號品名規格Amte PN/產品代號
00-672406-00Shutter, 150mmA-511-911640
04-712209-01Shield ScrewA11-230813
04-718996-01Bellows, Clamp ActuatorA11-210083
15-00043-02Adjuster Ceramic Gas PlateA-511-6207352
15-00341-00Screw
15-00371-00Nut, Heater Feedthru
15-00372-00Washer, Heater Feedthru, 1/4" NiA-511-1119111
15-00385-00Nut, 10-32 UNF-2BA-511-D617005
15-00386-00Washer, #10, NickelA-511-9112741
15-00399-04Screw, Hex, 8-32x1.02, NickelA-511-P913404
15-00401-00Shaft SpindleA-511-9112113
15-00457-00Screw, Heater StrapA-611-1116973
15-00475-00Insulator Gas Feedthru, Top PlateC-211-CB210229
15-00484-00Ring, Heater Centering, CeramicC-211-CB201477
15-00558-01Sleeve, Heater, Lead, Ceramic, 2"A-511-Z817153
15-00558-02Sleeve, Heater, Lead, Ceramic
15-00558-01Sleeve, Heater Lead 2", Ceramic
15-00567-00Tube, TC 1/8 ID, CeramicA-511-911224
15-00578-00Sleeve, Flange, Feedthru, CeramicA-511-C114782
15-00680-00Sleeve, TC CeramicA-511-9112226
15-00684-00Cap TC 1/16" ID CeramicA-511-911225
15-00699-01Fork, FingerC-211-2314417
15-00699-03Fork FingerC-211-0416246
15-00701-00Fork, Bottom Plate 6", CeramicCGZ-230641
15-00721-00Washer, #8, NickelA-511-P913405
15-00729-00Spindle Flat Clamp
15-00730-00Flange KeyedA-04-220122
15-00731-00Bushing, KeyedAGM-220847
15-00742-00Tube, TC, CeramicA-211-J612373
15-00839-00Screw, Nickel, 1/4-20*0.9A-511-9112484
15-00866-00Alox pin T02586C-211-6112067
15-00951-00Cup, Screw, CoverA-511-9112740
15-01111-00Paddle, 150mm OpticalA-511-M513590
15-029077-01Locator, Pin X-Ring 1, MOERCCB-220834
15-032014-00Quartz Window with Sapphire coatingA-511-9112058
15-032502-00Pin, Wafer LiftC-211-6113304
15-034333-00Tube, Process Inj. SpeedC-211-6113313
15-050160-15Tube, Process Inj. 1-1/2" SpeedC-211-6113310
15-051711-15Tube, Inj. 1.5" long, high Purity
15-051711-30Tube, Inj. 3" long
15-052619-00Tong Ring Lift, 200 mmC-211-6113311
15-053394-00Fork, Finger New TypeCCB-220697
15-054434-032.5 mm Moer Ring
15-100263-00Paddle, 200mm, Hi Purity
15-103651-00Ring, Guard C'Bore 200mm High PurityC-211-04201482
15-108330-00Spring, PED, CER, D3, WCVDC-211-CB19056
15-109921-00Cover, ESC, 200 mm semi
15-110411-00Sapphire WindowA11-210096
15-11507-00Ring, Excl, 200mm x 1.5 mm OH
15-120150-03Tube Injector Hi-Purity 0.5 inchAL5-230808
15-130746-01Fork, Finger, Min. Contact Area, 200mmA-511-CB20416
15-156718-00Ring, Moer, 200mm Semi, 1.00 mm OH
15-158185-00T03012 Ceramic TubeA-211-6111456
15-250878-00Moer ScrewC-211-AA17879
15-263147-00Ring, Ceramic, Top, Center, TrenchedA-211-GG210934
15-269388-00Carrier Ring, 300mm
15-277463-00Plate, Fork Retainer, Bottom
5-277464-00Plate, Top Fork Assy.A-511-9113744
17-00094-00Strap, LF Bias AlumA-511-9112743
17-00148-00Fork Spring
19-00111-00Lead Screw w/ nut
19-00266-01Motor, CX57-51 EXT MotorA-511-9112527
19-00267-01Motor, Concept one "C" type (90V), RotationA-511-9112528
19-034573-04Bearing Linear/Rotary 1 inch WTMA-511-M513734
19-034573-07Bearing, Wrist, 5/8" ID x 1.06" OD, Krytox 143 AD
22-00206-00Bearing Linear/Rotary 1 inch WTM
22-00236-00O-ring, ID 7.475 x CSD 0.275; VitonA-841-9111068
22-00288-00T Seal
22-00324-00Seal, Lip, "C" 1 1/16 inA-511-G913138
22-00361-00O-ring, SP 275x31 121D, VitonA-841-9113692
22-00612-00Valve, Springless Dia. NC, 1/4 in Fem, VCR
22-00657-00O-ring, 7.975" x 0.210", KalrezA-K31-9115149
22-026085-04Valve, 930, Mblk, F-F-F, NC/NC, SID
22-033312-00O-ring, ID 1.359 x CSD 0.139; Kalrez 4079A-K10-W118853
2-10367-00O-ring, ID 20.75 x CSD 0.21; Viton
22-137373-00O-ring, Metric, 6 mm x 320 mm, VitonAU2-220358
22-146276-00Valve, Pneu. Piaph, 2 Way, 125 PSIG
22-372976-00O-ring, Viton, AS568-382AU2-220357
22-372981-00O-ring, Viton, AS568-385AU2-220356
27-00010-01Thermocouple Type J 1/8"A-511-P213918
27-00062-00Gauge, Vacuum Pressure, Hastings
27-00127-00Thermocouple, Type E, LGA-511-9113604
27-10325-00Valve, Solenoid, 3 Way, Single Solenoid
27-126669-00Valve, Throttle, Controller
27-459003-00Lip SealA-511-9112025
34-118663-00Ckt Vrkr, 3P 40A, Ring Lug
34-130687-32Ckt Vrkr, 3A 2P, Ring Lug
60-00055-00Vaccuum gauge A11-210077
60-00194-00Switch, Vacuum, 20 Torr
60-034082-00Valve, Right Angle, O-seal, 1/2", NW16
60-10016-00Valve, Right Angle, 1-1/2", Pneu. NW40
60-10137-00Valve, In-Line, 3/4 in. Pneu. NW16
原廠料號品名規格Amte PN/產品代號
515-011116-001Tool Adjustable Sleeve NutA-511-G913126
713-011574-001Clamp, Plunger Wafer ClampA-511-G913243
713-011575-001Nut, Retainer A-611-9112190
713-011577-001Washer, Clamp RetainingA-511-9112585
713-011578-001Plunger, Sleeve GuideA-511-G913244
713-011579-001Guide PlungerA-511-G913245
713-011585-001Cover, Clamp BoltAGP-220797
713-011585-002Cover, Clamp Bolt
713-011585-003Cover, Clamp BoltAGP-220798
713-011585-004Cover, Clamp BoltA511-X116778
713-011926-001Cover, Clamp BoltA-511-G913001
713-011928-001Cap, Bolt Electrode RETA-511-9112586
713-011980-001HOUSING, Plunger
713-011981-001Plunger, Lower Clamp
713-018426-3696-
713-020911-102Plunger, Wafer ClampA-511-1120515
713-028485-001Bolt, Electrode Ring Clamp, Kel-FA-511-T015066
713-028487-001Ring, Confinement (Vespel)
713-065829-001SRC Linear Screw CoverA-431-0414465
713-140214-001Pin, Align Focus Ring fro ESC, VespelA-911-03210654
713-330153-003Rod, Clpg, Adjustable A-911-0316255
715-006310-001SpacerA-611-9114648
715-008721-001Electrode
715-010213-004Edge Calibration ToolA11-220647
715-011531-008Electrode A-511-9112343
715-011535-001Electrode Clamp Ring UpperA-511-W618472
715-011565-002Screw Vent #10-32 passivated SSA-511-9116221
715-011622-0014-pin Lifter ( replaced by 715-011622-101)
715-011622-1014-pin Lifter, Memory Pin
715-011622-1204-pin LifterAGP-220620
715-011626-001Ring, Cooling Lower ElectrodeA11-220884
715-011665-006Lower ElectrodeA-511-9114188
715-011746-161Plate Wafer Clamp 6 025 Dome Reduced HGTA-511-9113292
715-011749-004Ring, Edge Wfr Clamp
715-011749-005Ring, Edge Wfr Clamp
715-011749-006Ring, Edge Wfr ClampA-511-9114194
715-011749-008Ring, Edge Wfr Clamp
715-011753-001Plate Upper BaffleA-511-9112345
715-011781-001Plunger, 1/4 TurnA-511-9114078
715-011913-080Plate Lower BaffleA-511-9112344
715-011925-001Bolt, Clamp RetainingA-511-9114197
715-011982-001Cap, Plunger Housing LowerA-511-1117887
715-011985-006Cap, Lower Electrode 6in w/vent Groove, pinnedA23-240538
715-011985-106Cap, Lower Electrode 6in w/vent Groove, pinned
715-012111-002Cover, Arm Housing A11-230737
715-014556-013Gasket Drilled VCR 001390'A-511-9112222
715-021771-001Cover, Arm Housing, LifterAGP-220741
715-023950-001Spectula, ArmA11-230692
715-028305-001Clamp RainerA-511-9114077
715-028306-001Washer, 1/4 TurnA-161-9114352
715-028532-002Ring Cooling 8Inch ElectrostaticA11-230691
715-028627-001Plate, Lower BaffleA11-230535
715-13830-002Spetula, ArmA11-230669
715-330406-001Retaining Clip, Gas FeedA-511-BK210496/A-511-1119184
715-330445-002Plate, Adaptor, Upper Match, HingeA-511-23210178
715-331131-001HSG, MDL, Rctn Chamber, FXD.A-511-1119184
715-443178-001Ring, Edge HotA-511-L619118
716-005205-003PL CVR, Step, Qtz
716-006721-001Insulator Ring
716-007136-002HPT Upper Quartz Gas Ring
716-008645-001Ring, Qtz, Cover, HPT
716-011009-001Quartz WindowA-611-9113088
716-011057-002Upper Filler Ring, CeramicA-511-6517614
716-011427-003Ceramic Disk, DSQ716
716-011493-001Spacer, Quartz Module for 9608
716-011540-001Ring, Face, Upper EletrodeA-511-9112364
716-011543-001Plate, W/C Attachment, CeramicC-211-2313986
716-011543-002Plate, W/C Attachment, Ceramic
716-011543-003Plate, W/C Attachment, CeramicC-211-2313986
716-011563-261Plate, Wafer Clamp 6in Domed
716-011564-003Electrode, Upper for 4500AGP-220458
716-011570-001Filler, Oriffice Wafer Clamp, CeramicA-511-9112347
716-011571-001Washer, 1/4 TurnC-211-0008923
716-011573-001Plunger, 1/4" Ceramic
716-011573-002Plunger, 1/4" Ceramic
716-011573-003Plunger, 1/4" Ceramic
716-011573-004Plunger, 1/4" Ceramic
716-011573-005Plunger, 1/4" Ceramic
716-011603-001Plate SealA-911-0320395
716-011623-001Lower Ring Clamp for Lam 4420 Etcher
716-011638-006Ring, Focus, Thin EdgeA-511-9112365
716-011750-063Ring, Insert, 6" Universal
716-011830-006Ring, FocusC-211-0312460
716-011923-001Plate Attachment, Wafer ClampA-511-1114174
716-011969-002Ring, Quartz, Coupling
716-011980-001Housing PlungerA11-220694
716-011981-001Plunger, Wfr, Clamp, LWRA-511-23210866
716-012639-117Qtz Inj. Dual IEP
716-012640-012
716-013344-001Ring, Cover, GND
716-013402-003Cover Ring, Qtz
716-013402-008Hot Edge Ring, Cover
716-013402-054Quartz Ring
716-014317-006Holder, TCP CoilCY4-230663
716-014843-001Ring, WAP, Qtz, Generic 17" DFC
716-014843-371
716-014843-353AGM-220840
716-016763-001Rg, Filler Inv Step, 200mm
716-017112-523Quartz
716-017112-526AGM-220841
716-018468-092Ground Cover Ring
716-018468-196Ring, Cover, Outer, GND Adj GapAGM-220839
716-018614-081Ring, Focus, 9600 Notch
716-020323-001Holder, TCP CoilCY4-230575
716-020904-016Ring, Edge, Focus, LWR WFRA-511-D615826
716-020907-261
716-022030-004Quartz Short PinA-311-H812852
716-022498-001Ceramic pinCMI-250004
716-026652-902Ring, Edge, BOT, Qtz, 200-300mm
716-026652-911Bottom Edge Ring, Qtz
716-026652-924Ring, Edge, Bot, 200-300 mm
716-028033-001Insulator, Electrode Cap, 6" 4620
716-028249-061Ring, Focus, ESC C23-220433
716-028249-064Focus Ring, 6", ESC, Lwr Mjr Flat, 9600SEC-211-D613784
716-028414-016Focus Ring C-211-0313041
716-028454-012Quartz Disk
716-028668-2616" Clamp RingC-211-0314551
716-028721-261Plate, Bottom Wafer ClampC11-220659
716-028721-281Clamp Ring, 8"
716-028722-161Clamp, Wafer BottomA-511-9114003
716-028725-161Ring, Bottom Clamp
716-030135-001Ring, Focus, 8" ESC Edge
716-030136-001Ring, Edge 6", for Lam 9400AGP-220546
716-030136-016Edge Ring, Ceramic
716-031257-521Ring, Edge, Top Qtz EBP 200 mm
716-031257-531Top Edge Ring, KIYO45
716-031257-668Combo Ring
716-031453-002Filler RingA-511-J513639
716-040737-431R, CPLG, Qtz, Bias PU, W-O FL, 300 mm
716-043438-121
716-043438-442Ring, Coupling, Qtz
716-053569-020
716-057993-371Ceramic
716-066539-006Ring, PEZ, UPR, BEVEL, Y2O3 Coated
716-067739-105Ring, Qtz, Cover
716-077262-564Top Edge Ring
716-077262-901
716-080138-015Ring, Edge, Top, Quartz, Wrap
716-080139-012Ring, Edge, Bottom, Quartz, Wrap
716-081664-021Quartz
716-081664-031Quartz
716-086795-267Quartz
716-083964-005Quartz
716-087943-862
716-140068-001Ring, Focus, 6", CeramicA-511-9114224
716-140069-002Plate, Upper Insulator 6"
716-140118-001Ring, Focus, ESC 8"
716-140139-001Ring Hot Edge 8"
716-140139-211Ring, Hot Edge
716-140139-213Ring, Hot Edge, Hi Wall, ESC 8"
716-140163-001ESC Hot Edge RingC23-230538
716-140236-103Confinement Ring, Qtz
716-140432-001Ring, Upper Keyed Etch
716-140469-002HPT Coupling Ring
716-160255-002Quartz Bell Sleeve
716-236356-341Ring, Edge, Bot., Stpd, Qtz
716-238517-001Ceramic
716-244068-021Ring, Edge, Replaceble Step, Qtz
716-330045-004Edge Ring, Notched
716-330045-281Ceramic Edge Ring
716-330121-001WDO, RF Shpd Cer Fxd GAPNA-511-9112078
716-330121-014Window RF Ceramic Showhead
716-330121-016RF Shaped Window (6" or 8")
716-330121-160Shaped Window, 8"
716-330121-211RF Shaped Window (6" or 8")
716-330122-002Top Plate, Ceramic
716-330122-003Top Plate, Ceramic Fixed GapA-211-4107282
716-330167-261Ring, Clamp, Bottom, ActuatorC-211-0313437
716-330167-268Clamp Jeida 6" BACA-211-W1210007
716-330504-061Ring, Focus 6" Gurading JEIDA ESC
716-330504-064Ring, Focus, 6in, ESC, Guard, TCP9600A-511-9112037
716-330504-081Ring, Focus, 8in, ESC, Guard, TCP9600A-511-G913241
716-330504-160Ring, Focus, 8"
716-330890-001Ring, Baser, landed
716-330891-002Window, TCP Qtz
716-330892-007GDP 21 Hole P/C
716-330915-001Ring, Insulator, Ceramic
716-331051-006DFM Non-Coated U Ring
716-331088-001Edge Ring, 8", ES, NCH, Top Qtz
716-331088-404Ring, Edge, 8", ES, NCH, Top
716-331142-007Edge Ring
716-331142-201Ring, Edge Top Wide NSG
716-331157-004Quartz Disk for 9400 DFM
716-440345-261Plate Bottom Wafer ClampA-511-2314651
716-443090-010Ring, Qtz, Upper, HP
716-443189-002Ring, Focus, Upper, Qtz
716-443230-002Confinement Ring, Qtz
716-443234-002Ring, Focus, Qtz HPT
716-800330-002Insula Ring, ESC, 300mmCDS-210122
716-800951-201Base, FESR, Shield, 200 mm
716-801568-002Window, Quartz
718-094523-261Assy, Electrode ESC, 6" MJR FLT LTA-111-0319299
720-000930-020Screw, Socket, Hard 6-32 UNC-2AX1, 1/4 SSTA11-220880
720-001001-004Screw, Pan Head, 6-32 x 1/4, SSTA11-220882
720-009531-010FLT HD SCR 6-32 Kel-FA-511-1116146
720-009531-101Flat HD SCR 6-32 5/8 Lg KEL-FA-511-1116146
720-090943-010Slotted Flat Head Screw, 10-32 x 5/8"A-891-9113921
723-001204-010Standoff, Round 6-32, 1/4 x 5/8A11-220881
734-000229-001O-ring, 11" ID x 1/8 CSD, VitonAGP-220394
734-000663-001O-ring, 44.04 ID x 3.53 CSD, Viton
734-001081-001O-ring, 5.484 ID x 139 CSD
734-006000-001O-rig, E.P. Side WallA-841-9111148
734-007293-001O-ring, Inner Electrode
734-007335-001O-ring, 11/16 ID x 1/16 CSD
734-007369-001Quard Ring, 58 ID x 116 CSDA-841-1418570
734-007460-001O-ring, 6.987 ID x .103 CSD, Viton, BlackA-841-9112917
734-008546-001O-ring, Arm Cover 4500A-841-9112913
734-009250-001O-ring, Window Quartz, 9400A-841-9114056
734-061280-274O-Ring, 9.984ID x 1.39C/s, Viton
734-092038-001DSQ Gas Ring
734-092040-001O-ring, 8 1/2 ID x 3/32 C/S, Fsilicon
734-092041-001O-ring, 11 1/2 ID x 3/16 C/S Fsilicon CVFVMQ
734-092069-001O-Ring, 2.675ID x 3/32C/s, Viton
734-092107-001O-ring, 227.97 x 5.33 Viton Gate Seal
734-092830-001O-ring
739-007783-001Seal QualA-611-D616991
742-007760-001Gasket, RF Wire Over ElasticsA23-220422
742-093215-002Gasket, EMI, Spiral, W/cordAGP-230577
746-007608-001Washer, Thrust .25"x.060"A-511-9112950
746-007700-001Radial Ball BearingA11-220714
750-007747-453Belt, Timing, 453 GrooveA-611-9115489
754-009002-015SpringA23-220895
754-090359-015Compression Spring for 4520A-511-G913242
765-008372-001EncoderA-511-9112108
768-001063-001Switch, Vacuum, 75 TorrAGP-220401
768-090914-001Switch, Vcuum, 1/4 VCRAGP-220848
777-090453-001Convection Gauge, 1/4" VCR
796-000233-003Seal, Centering NW50
796-008792-012Screw, SCHD Vented 10-32 x 34SA-511-9112417
796-008792-016Screw, SST, 10-32, Vent, 1"
796-008792-018Screw, SST 10-32 Vent 1"AY4-230019
796-028633-010Screw, Fl. HD. Sltd, VNT, 6-32x5/8, AlA-511-9112835
839-011906-001Electrode, SiliconA23-240130
839-014757-067Weldment Flex Gas Feed LineA-511-23210268
839-032106-002Weldment, 90 Degree ElbowA-511-1119042
839-190104-001Assy, Gnd Srp, Flt CaA-511-1118308
853-011076-001Assy. Ground StripA-511-1118308
853-012566-001Assy, Shuttle SpectulaA11-230040
853-017480-001Switch, Vac 75 Torr VCR for RainbowAGP-220404
853-017631-002Switch, Chamber ATM Switch, 724 TorrAGP-220402
853-021917-0066" Heated Paddle
853-031764-001Lifter Assembly w/ BellowsAGP220799
853-131456-001Valve connectorA11-230707
856-331069-001Pumping Port Linear AssyA11-230520
857-010229-001Kit Gap Cal CVRS .8-1.4 SpacingA-511-G913155
原廠料號品名規格Amte PN/產品代號
TEL
1310-290833-136" C/S Arm PincetteC-211-EW211010
1310-392423-14P-Holder (6"- C/A)C-431-EW211006
1310-496960-11Damper Shaft
1310-497170-11Cover Top
1380-000929-11C/S PincetteC-211-9119571 / CER-R-145
1380-001253-138" Spin Chuck
1805-220135-23Ring, Exhaust
1805-320103-22Base Ring
1805-320104-22Ring, Holder
1805-320109-21Cover Ring, Outer, 200mm TEL 855SS
1805-320110-31Cover Ring, Inner, 200mm TEL 855SS
1810-224789-11
1810-329156-11Ring, Focus, 200mm Tel 855SS
1904-300020-12V8 Block SiC
1904-300126-118" Standard Block851-0506407
1910-214037-11EXH Chamber (DHP)AEW-220699
1910-318288-14Guide (6"-C/A) RC-431-EW211004
1910-318288-14Guide (6"-C/A) LC-431-EW211005
1910-355178-118" PincetteAG2-220795
1910-423414-11Pipe Guide
1910-423734-11Ext Pipe
1910-424257-11CC Block
1910-426349-13TEL Mark-8 SUS Lift PinA-111-EW201928
1910-439132-11Support Pin 4.6 mm
1910-455174-11Wafer Block, 6" ArmC-211-2313390
2904-390015-11Finger (8" Std Block), PRA, ACT-8851-0506407
2910-401462-12PinAWE-240434
2910-401478-13PinAWE-240435
310-290647-7C/S Pincette arm, 6", TelC-211-J612357
3M10-307933-12C38-220791
1D10-401106-12Plug, DRM2
1M85-001048-12Shield RingA-03-220171
2L10-452968-11ScrewMB5-210210
CT2904-490070-11TEL Mark-8 Nozzle Tip
CT2910-426575-11Ceramic PinCH0-220835
ES810-220113-2Plate, Exhaust for TEL 5000A-461-0318128
DNS
2-39-55387Vacuunless Arm Ceramic, 6", IDACEW-220888
2-39-55389SVacuunless Arm Ceramic, 6"C-211-9114834
2-F3-32084Spin Chuck AEW-220756
2-F3-83247IH ArmC-211-0308933
2-F3-91849Guide, 200mm Dia. WaferAEW-220262
2-H3-90083Ceramic Endeffector, 8"CEW-220176
2-J3-8C936Spin Chuck Disk, 200 mm waferAEW-220184
2-J4-34997Chuck PinAEW-220146
2-J4-35537Chuck Pin (Fixed Pin)AEW-220188
2-J4-87394Chuck DiskAEW-220189
Tegal
40-140-003Ring, Gas, Insulator, CeramicC-211-D814634
40-395-001Ceramic Focus Ring, Flat 6"C-211-0311630
40-296-001RF Connection to ElectrodeA03-220729
Others
17D6283P-Shower Filament InsulatorC-211-D613722
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